Soni, and Kumari, Swati and Sharma, S K and Mishra, Suman K (2018) Effect of Deposition Pressure, Nitrogen Content and Substrate Temperature on Optical and Mechanical Behavior of Nanocomposite Al-Si-N Hard Coatings for Solar Thermal Applications. Journal of Materials Engineering and Performance, 27(12) (IF-1.094). pp. 6729-6736.
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Abstract
Hard and optically transparent nanocomposite Al-Si-N thin films were deposited using DC magnetron sputtering at different process parameters. There was a significant effect of these parameters on the film properties affecting its mechanical and optical behavior. The nitrogen content or pressure, deposition pressure and substrate temperature strongly influence the phase formation which governs the hardness and optical transparency of the coating. Hardness was measured between 18 and 30 GPa. The band gap could be varied in the range of 3.8-4.2 eV by varying nitrogen pressures in the chamber during deposition. The films showed (0-80)% transparency in UV and visible region depending on the sputtering conditions.
| Item Type: | Article |
|---|---|
| Official URL/DOI: | https://doi.10.1007/s11665-018-3730-y |
| Uncontrolled Keywords: | mechanical behavior;nanocomposite hard coatings;optical coating |
| Divisions: | Material Science and Technology |
| ID Code: | 7891 |
| Deposited By: | Sahu A K |
| Deposited On: | 18 Sep 2019 18:03 |
| Last Modified: | 18 Sep 2019 18:03 |
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