Development of hard and optically transparent Al-Si-N nanocomposite coatings

Mishra, Suman K and Kumari, Swati (2017) Development of hard and optically transparent Al-Si-N nanocomposite coatings. Surface and Interface Analysis, 49(4) (IF-1.132). pp. 345-348.

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Abstract

Nanocomposite Al-Si-N coatings have been successfully deposited by d.c. magnetron sputtering on different technological important substrates such as Si, SS-304, and glass. In this manuscript, the structural, mechanical, and optical properties of the Al-Si-N have been investigated. A solid solution of Al-Si-N phase is formed with a wurtzite hexagonal nc-AlN structure. The Al-Si-N films showed a high hardness 30GPa, modulus 300GPa, and elastic recovery, We=54% and H/E=0.1, which are the essential conditions for enhanced crack-resistant coatings. Moreover, the films were optically transparent in ultraviolet and visible range with a transparency of 90% with an optical band gap of 3.8eV. Copyright (c) 2016 John Wiley & Sons, Ltd.

Item Type: Article
Uncontrolled Keywords: sputtering; nanocomposites; thin films; hard and transparent
Subjects: Materials Science > Materials Charcterization
Divisions: Material Science and Technology
Depositing User: Users 5 not found.
Date Deposited: 18 Aug 2017 12:12
Last Modified: 18 Sep 2017 10:54
URI: http://eprints.nmlindia.org/id/eprint/7630

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