Effect of pressure and substrate temperature on the deposition of nano-structured silicon–carbon–nitride superhard coatings by magnetron sputtering

A systematic investigation on the deposition of silicon–carbon–nitride (Si–C–N) films under varying deposition conditions such as pressure, substrate temperature and nitrogen content was carried out by radio frequency and direct current magnetron sputtering techniques. Significant role of the different deposition parameters on hardness and structure in the film was observed. It was observed that there was a certain range of nitrogen to argon partial pressure ratio (90:10 to 98:2) for which the particle size was reduced and the films were smooth with fine particle growth, beyond this limit the films had larger particle growth and roughness. The hardness of the deposited film varied between 4400 Hv and 473 Hv depending on deposition condition. Si–C–N film with hardness above 4400 Hv by reactive RF magnetron sputtering from SiC–C composite target in nitrogen–argon was obtained. X-ray diffraction studies revealed the amorphous nature of the deposited films, whereas nano-crystallinity of the particles was noticed during atomic forced microscopy observations. X-ray photoelectron spectroscopy analysis showed the presence of C–N and Si–N bonds in the harder films. It was found that the presence of β-C3N4, Si3N4 and graphite phases and the particle growth in the deposited films control the hardness of the film.